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Dr. W. Alan Doolittle
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Contact Information: Phone and Fax: 404-894-9884 Email: alan.doolittle@ece.gatech.edu Mail: School of Electrical and Computer Engineering Georgia Institute of Technology 777 Atlantic Dr. Atlanta, GA 30332-0250
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Advanced Semiconductor Technology Facility
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1800 ºC High Temperature SiC CVD Epitaxy System |
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Materials Grown: • Silicon Carbide, (SiC) (future) Applications of these Materials: • Power transistors with 10 times higher power density than Si technologies • Substrate preparation for III-Nitrides Special Features: 50 Kilowatt RF Supply
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