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Dr. W. Alan Doolittle
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Contact Information: Phone and Fax: 404-894-9884 Email: alan.doolittle@ece.gatech.edu Mail: School of Electrical and Computer Engineering Georgia Institute of Technology 777 Atlantic Dr. Atlanta, GA 30332-0250
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Advanced Semiconductor Technology Facility
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Fabrication Tools |
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MJB-3 Mask Aligner |
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Highlighted tools on this page (scroll down): Substrate Annealing Furnaces Thermal Evaporator Mask Aligner
Partial List:
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Free Access within ASTF Thermal Evaporators (Qty 2) Ebeam Evaporator 4” Tube Furnace RTP Furnace (Qty 2) MJB-3 Mask Aligner PR spinner and multiple curing ovens
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Shared Fee Access external to ASTF Jeol Electron Beam Lithography (10 nm resolution) Aztec ECR Plasma Deposition System capable of depositing diamond-like films and florinated diamond-like films CVC DC Sputterer CVC RF Sputterer CVC E-Beam Evaporator CVC Filament Evaporator Hitachi 3500H SEM/EDS Karl Suss MA-6 Mask Aligner (0.5 um resolution) Karl Suss MJB-3 Mask Aligner (qty 3) Karl Suss RC8 Spin Coater LapMaster Lapper LapMaster Polisher LFE Barrel Etcher Lindberg 4 tube Furnace Woollam Spectroscopic Ellipsometer Nanospec Profilometer OAI: Optical Associates, Inc. Mask Aligner Plas-Mos Ellipsometer Plasma-Therm ICP Plasma-Therm PECVD Plasma-Therm RIE Plasma-Therm SLR RIE Samco UV Ozone Dry Stripper Solitec Developer, Specialty Coating Systems Spin Coater Samco UV Ozone Dry Stripper STS PECVD Veeco AFM Veeco Dektak Profilometer Wyko Profilometer AET RTP Dicing Technologies Dicing Saw Ernest Fullam Sputter Coater
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Substrate Annealing Furnace |
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Filament (Thermal) Evaporator (1 of 2) |
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• GaN based HEMTS on SiC, Sapphire, Lithium Niobate, ZnO and Lithium Gallate • InN based Solar Cell and substructures • LEDs and (soon) Laser diodes • Complex metal oxide – SiC MOS devices
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Electron Beam Evaporator |
