Note:  Some of these notes contain errors that will be corrected in class.  You are responsible for any corrections given in class.  Also, these Lecture notes are to supplement the class discussions, reading material and homework.  Not everything that you “need to know” is included within these notes.

 

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Lecture 1:

Lecture 2:

Syllabus

Lecture 3:

Lecture 4:

Lecture 5:

Lecture 6:

Lecture 7:

Supplemental Lecture 7b (do not print):

Lecture 8 & 9:

Supplemental Intel efforts in Extreme UV Lithography

Lecture 10:

Supplemental Tom Kropewnicki - Applied Materials Lecture on Copper Interconnects and Dual Damascene Technology

Lecture 11:

Lecture 12:

Lecture 13 & 14:

Lecture 15:

Dr. Alan Doolittle

Dr. Alan Doolittle

208 Pettite MiRC Building

Address:

777 Atlantic Dr.

Atlanta, GA 30332-0250

Phone & Fax: 404 894-9884

alan.doolittle@ece.gatech.edu

ECE 6450

Introduction to Microelectronics